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#waveguide

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"We illustrate the potential of these concepts by fabricating #nanostructures that are impossible to make with any other known method: #waveguide-coupled high-Q silicon photonic cavities that confine telecom #photons to 2 nm air gaps with an aspect ratio of 100, corresponding to mode volumes more than 100 times below the #diffraction limit. Scanning transmission electron microscopy measurements confirm the ability to build devices with sub-nanometre dimensions."

nature.com/articles/s41586-023

NatureSelf-assembled photonic cavities with atomic-scale confinement - NatureSilicon photonic nanocavities based on surface forces and conventional lithography and etching are developed, demonstrating pioneering technology that integrates atomic dimensions with the scalability of planar semiconductors.